lithography topic
gdshelpers
GDSHelpers is an open-source package for automatized pattern generation for nano-structuring.
Raith_GDSII
MATLAB tools for Raith electron-beam lithography (EBL) and focused ion beam (FIB) systems — Outils MATLAB pour les systèmes Raith de lithographie par faisceau d'électrons et de faisceau d'ions focalis...
Lithography-Simulation
Github repository to share some insights about lithography simulation.
Qiskit-Metal-to-Litho
From Qiskit Metal to pattern generation to real nanofabrication demo. Here, quantum devices on a chip are patterned via direct-write electron-beam lithography in a nanofabrication facility. Written &...
TorchLitho
Differentiable Computational Lithogrpahy Framework
Wafers-Defect-Recognition-using-Visual-Transformer
We use MixedWM38, the mixed-type wafer defect pattern dataset for wafer defect pattern regcognition with visual transformers.
ASML_JobCreator
Python program your Job files for an ASML PAS 5500 Stepper Lithography system, by the UCSB Nanofabrication Facility.
Defect-Prediction-in-Semiconductor-Lithography
Lithography defect prediction for microchip manufacturing optimization with machine learning model