lithography topic

List lithography repositories

gdshelpers

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GDSHelpers is an open-source package for automatized pattern generation for nano-structuring.

Raith_GDSII

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MATLAB tools for Raith electron-beam lithography (EBL) and focused ion beam (FIB) systems — Outils MATLAB pour les systèmes Raith de lithographie par faisceau d'électrons et de faisceau d'ions focalis...

Lithography-Simulation

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Github repository to share some insights about lithography simulation.

Qiskit-Metal-to-Litho

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From Qiskit Metal to pattern generation to real nanofabrication demo. Here, quantum devices on a chip are patterned via direct-write electron-beam lithography in a nanofabrication facility. Written &...

We use MixedWM38, the mixed-type wafer defect pattern dataset for wafer defect pattern regcognition with visual transformers.