TMC2130 Connection error

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Hello, I'm having trouble using the board with my TMC2130's. M122 gives the following:

Recv: X 0x00:00:00:00 Bad response! Recv: Y 0x00:00:00:00 Bad response! Recv: Z 0x00:00:00:00 Bad response! Recv: E 0x00:00:00:00 Bad response! Recv: E1 0x00:00:00:00 Bad response! Recv: E2 0x00:00:00:00 Bad response! Recv: Recv: Recv: Testing X connection... Error: All LOW Recv: Testing Y connection... Error: All LOW Recv: Testing Z connection... Error: All LOW Recv: Testing E connection... Error: All LOW Recv: Testing E1 connection... Error: All LOW Recv: Testing E2 connection... Error: All LOW

I have tried this fix: https://github.com/makerbase-mks/MKS-RUMBA32/wiki/About-RUMBA32-TMC-SPI-%22CONNECTION-ERROR%22-FAQ But i get the same error. No change.