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Layer when it isn't top layer doesn't stop etch

Open mwdvorak opened this issue 4 years ago • 0 comments

Hi, It appears that when there's a layer above a non-etching layer, then the etch goes through as if the non-etching layer wasn't there.

depth(1) height(6)

dbu(0.0001) delta(10 * dbu)

lmetal1 = layer("18/0") lvia = layer("21/0") substrate = bulk

metal1 = mask(lmetal1).grow(0.2) oxide = all.grow(1) mask(lvia).etch(1.4, :into => [substrate, oxide] )

output("substrate/0", substrate) output("oxide/0",oxide) output("metal1/0", metal1)

image image

If you remove the top oxide layer, the etch won't go through metal1, but if it's present, it will.

Is this a known feature of Xsection?

mwdvorak avatar Jul 24 '20 00:07 mwdvorak